6 : Methane (CH4) 28 : Phosphine (PH3) 30 : Sulfur hexafluoride (SF6) 38 : Ethylene (C2H4) 42 : Carbon tetrafluoride (CF4) 51 : Methyl fluoride (CH3F) 52 : Germane (GeH4) 55 : Nitrogen trifluoride (NF3) 201 : Silane (SiH4) Partition functions of molecule NF3 Survey Note. In view mode files longer than 2048K are truncated.